Welcome friends, In the previous post I have explained introductory things on MEMS. Today I will discuss on the features of the same topic.
MEMS - Basic micro-fabrication techniques
- Miniaturization : Micro machines (sensors & actuators) can handle micro-objects & move freely in small space about their mean position.
- Multiplicity : (1)co-operative work from many small machines may be best way to perform a large task. (2) Inexpensive to make many machine in parallel.
- Micro-Electronics : Integrate micro-electronics control devices with sensors & actuators
- Bulk Micro-machining
- Surface Micro-machining
- Cantilever Beams
- Diaphragms
- Electrostatic Motors
- Bulk micro-machined accelerometer
- Single chip microphone
- Single chip acclerometer ( Basically these are analog devices )
- Lab-on-a-chip (Bio-MEMS)
- Drug delivery system (Bio-MEMS)
- DNA analyzer (Bio-MEMS)
- A driver for multiple, mixed technology integration.
- Orders of magnitude increases in the number of sensors & actuators
- Beneficiary of & driver for information systems.
- VLSI as a design & synthesis approach for microelectronics.
- Interdisciplinary terms will be needed.
- MEMS will counter the tendency for narrow specialization.
- Teams that best integrate multiple disciplines will be best positioned for future applications
- New materials needed.
In short the space for research and development for MEMS is unlimited. In the next post I will introduce the topic on micro-sensors. Thank You very much.
I like ur intrest in technology...
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